Among the super-resolution methods single-molecule localization microscopy (SMLM) is remarkable not only for best practically achievable resolution but also for the direct access to properties of individual molecules. The primary data of SMLM are the coordinates of individual fluorophores, which is a relatively rare data type in fluorescence microscopy. Therefore, specially adapted methods for processing of these data have to be developed. I developed the software SharpViSu and ClusterViSu that allow for most important data processing steps, namely for correction of drift and chromatic aberrations, selection of localization events, reconstruction of data in 2D images or 3D volumes using different visualization techniques, estimation of resolution with Fourier ring correlation, and segmentation using K- and L-Ripley functions. Additionally, I developed a method for segmentation of 2D and 3D localization data based on Voronoi diagrams, which allows for automatic and unambiguous cluster analysis thanks to noise modeling with Monte-Carlo simulations. Using advanced data processing methods, I demonstrated clustering of CENP-A in the centromeric regions of the cell nucleus and structural transitions of these clusters upon the CENP-A deposition in early G1 phase of the cell cycle.